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发明名称
同位体イオン顕微鏡方法およびシステム
摘要
Ion microscope methods and systems are disclosed. In general, the systems and methods involve relatively light isotopes, minority isotopes or both. In some embodiments, He-3 is used.
申请公布号
JP5634396(B2)
申请公布日期
2014.12.03
申请号
JP20110514670
申请日期
2009.05.26
申请人
发明人
分类号
G01N23/225;H01J37/252;H01J37/30
主分类号
G01N23/225
代理机构
代理人
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地址
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