发明名称 FINFET DEVICE AND METHOD OF FABRICATING SAME
摘要 <p>An integrated circuit structure includes a semiconductor substrate, and isolation regions extending into the semiconductor substrate, wherein the isolation regions have opposite sidewalls facing each other. A fin structure includes a silicon fin higher than top surfaces of the isolation regions, a germanium-containing semiconductor region overlapped by the silicon fin, silicon oxide regions on opposite sides of the germanium-containing semiconductor region, and a germanium-containing semiconductor layer between and in contact with the silicon fin and one of the silicon oxide regions.</p>
申请公布号 KR20140138049(A) 申请公布日期 2014.12.03
申请号 KR20140060737 申请日期 2014.05.21
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 CHING KUO CHENG;HUANG JIUN JIA;WANG CHAO HSIUNG;LIU CHI WEN
分类号 H01L29/78;H01L21/335 主分类号 H01L29/78
代理机构 代理人
主权项
地址