| 摘要 |
The present invention provides a substrate transfer robot that can have access to a substrate mounting portion at a farther position even without having to increase the size of the robot. The substrate transfer robot (13) is provided with a hand portion (131), an arm (132) that moves the hand portion (131), and a control unit (133) that controls the movement of the hand portion (131). In a plan view, the control unit (133) has a substrate holding center (138) in the vicinity of a cassette (30). In a plan view, the control unit (133), in a state where a substrate holding center (138) is positioned at an access initiation position (141) in the vicinity of a cassette (30) and is a predetermined distance apart from the cassette (30), controls the position and direction of the hand portion (131) so that the substrate holding center (138) reaches a substrate mounting position (142) in the cassette (30) in a state where a hand center line (139) is inclined to an access straight line (304) and the hand center line (139) corresponds to the access straight line (304). |
