X-ray multiple spectroscopic analyzer

摘要

An X-ray multiple spectroscopic analyzer includes an X-ray source, an optical system inputting X-rays to a single-crystal sample, a sample stage supporting the single-crystal sample, an X-ray diffraction detector, a rotation driving system that changes the angle of the X-ray diffraction detector, an X-ray diffraction measurement data storage unit, a structural analysis data analyzing unit, an energy-dispersive X-ray fluorescence detector, an X-ray fluorescence measurement data storage unit, an X-ray fluorescence analyzing unit, an X-ray fluorescence analysis data storage unit, and X-ray fluorescence analysis data acquiring unit. The structural analysis data analyzing unit analyzes the data of the crystal structure further on the basis of the analysis data of the fluorescent X-rays output from the X-ray fluorescence analysis data acquiring unit.

主权项

1. An X-ray multiple spectroscopic analyzer comprising:
an X-ray source radiating X-rays; an optical system inputting the X-rays radiated from the X-ray source to a single-crystal sample; a sample stage supporting the single-crystal sample, with one or more rotation driving systems for rotating the single-crystal sample; an X-ray diffraction detector detecting diffracted X-rays generated from the single-crystal sample; a rotation driving system changing the angle of the X-ray diffraction detector with respect to the single-crystal sample; an X-ray diffraction measurement data storage unit for storing measurement data of the diffracted X-rays detected by the X-ray diffraction detector; a structural analysis data analyzing unit for analyzing data of a crystal structure on the basis of the measurement data of the diffracted X-rays stored in the X-ray diffraction measurement data storage unit; an energy-dispersive X-ray fluorescence detector detecting fluorescent X-rays radiated from the single-crystal sample; an X-ray fluorescence measurement data storage unit storing measurement data of the fluorescent X-rays detected by the energy-dispersive X-ray fluorescence detector; an X-ray fluorescence analyzing unit for analyzing the fluorescent X-rays on the basis of the measurement data of the fluorescent X-rays stored in the X-ray fluorescence measurement data storage unit; a beam stopper, being disposed opposite to the optical system about the single-crystal sample and blocking a direct beam of X-rays input to the single-crystal sample from the optical system; an X-ray fluorescence analysis data storage unit for storing analysis data of the fluorescent X-rays output from the X-ray fluorescence analyzing unit; and X-ray fluorescence analysis data acquiring unit for acquiring the analysis data of the fluorescent X-rays stored in the X-ray fluorescence analysis data storage unit and outputting the acquired X-ray fluorescence analysis data to the structural analysis data analyzing unit, wherein the structural analysis data analyzing unit analyzes the data of the crystal structure further on the basis of the analysis data of the fluorescent X-rays output from the X-ray fluorescence analysis data acquiring unit, and wherein the energy-dispersive X-ray fluorescence detector comprises a light-receiving portion receiving the detected X-rays, and an X-ray blocking member, being disposed between the beam stopper and the light-receiving portion and blocking fluorescent X-rays radiated from a part of the beam stopper which is directly irradiated with the direct beam.