1-CHIP-TYPE MEMS MICROPHONE AND METHOD FOR MAKING THE 1-CHIP-TYPE MEMS MICROPHONE

摘要

The present invention relates to a 1-chip-type MEMS microphone and a method for manufacturing the same. The purpose of the present invention is to provide a 1-chip-type MEMS microphone and a method for manufacturing the same. The structure of an existing 1-chip-type MEMS microphone is improved, thereby reducing the number of components and processes, improving rigidity by replacing component materials, saving costs, and improving sensitivity and performance.