Airborne impurities detection

摘要

Systems and methods for detection of airborne impurities in confined spaces are disclosed. In one embodiment, a detection system to detect impurities in a confined chamber comprises an emitter to emit radiation, at least one channel positioned proximate the emitter to receive radiation from the emitter at a first end of the channel, and a receiver positioned proximate a second end of the channel to receive radiation from the emitter, and generate a first signal in response to the radiation received from the emitter. Other embodiments may be described.

主权项

1. A system to detect impurities in a chamber, the system comprising:
an emitter to emit radiation; a plurality of channels integrated into a surface of the chamber to receive radiation from the emitter; a plurality of beam splitters to direct radiation from the emitter into the plurality of channels; and a plurality of receivers to:
receive radiation from the emitter; andgenerate a first plurality of signals in response to the radiation received from the emitter.