| 摘要 |
<p>The present invention relates to a substrate processing apparatus. The substrate processing apparatus according to an embodiment of the present invention includes: a moving member moving in a mechanical motion; a motor supplying power to the moving member; a control unit which sends a control signal to the motor to control the rotation of a rotation shaft of the motor; and a detection member which transmits a detection signal to the control unit corresponding to the rotation speed of the rotation shaft. The control unit detects an error occurred during the motor operation based on an error detection signal which is calculated by using the control signal as a basis.</p> |
