Sputtering device with gas injection assembly

摘要

A sputtering device includes a chamber; and a substrate transferring unit for loading a substrate into, or unloading the substrate from the chamber, the substrate transferring unit including a gas injection assembly forming a gas cushion between the substrate and an upper surface of the substrate transferring unit.

主权项

1. A sputtering device, comprising:
a chamber; and a substrate transferring unit for loading a substrate into, or unloading the substrate from the chamber, the substrate transferring unit comprising a supporting unit for supporting the substrate, and a gas injection assembly mounted on the supporting unit and forming a gas cushion between the substrate and an upper surface of the substrate transferring unit, wherein the gas injection assembly comprises: a plurality of nozzle groups including a plurality of gas injection nozzles, the gas injection nozzles including an injection opening and a plurality of inlets arranged around the injection opening; gas flow amount controllers spaced from the gas injection nozzles with a certain interval; and at least one distance detecting sensor attached to a front surface of the gas injection assembly and provided at each of the nozzle groups, respectively, to individually measure a corresponding distance between the substrate and corresponding gas injection nozzles, wherein a height of the gas cushion is controlled based upon the measured distance and the gas flow amount controllers.