Method and apparatus for attachment of MEMS devices

摘要

A pedestal projection having reduced cross-sectional area secures a MEMs device to a housing surface in a manner which reduces strain on the MEMS die due to differences in coefficients of thermal expansion while more evenly distributing to the MEMS sensor any external forces mechanically coupled through the housing structure. The pedestal projection may be integrally formed with a surface on either MEMS die or housing member and is axially aligned with the structure which anchors the MEMS sensor to the MEMS die.

主权项

1. A microelectromechanical (MEMS) device comprising:
a MEMS die member having a handle layer with a first surface area; a pedestal projection extending outward from the handle layer and defining an attachment end having a second surface area; a sensor positioned symmetrically relative to an end of the anchor; and wherein a mutually exclusive ratio of the first surface area to the second surface area is greater than 3 to 1.