Methods for manufacturing carbon ribbons for magnetic devices

摘要

In one embodiment of the invention, there is provided a method for manufacturing a magnetic memory device, comprising: depositing a carbon layer comprising amorphous carbon on a substrate; annealing the carbon layer to activate dopants contained therein; and selectively etching portions of the carbon layer to forms lines of spaced apart carbon conductors.

主权项

1. A method for manufacturing a magnetic memory device, the method comprising:
depositing a carbon layer, including amorphous carbon, on a substrate; performing a rapid thermal annealing (RTA) to activate dopants in the carbon layer; selectively etching portions of the carbon layer to form a plurality of carbon bit lines for the magnetic memory device as lines of spaced-apart carbon conductors; and forming a plurality of magnetic tunnel junction (MTJ) stacks of the magnetic memory device such that each MTJ stack is electrically coupled to a carbon bit line from the plurality of carbon bit lines.