Durable conformal wear-resistant carbon-doped metal oxide-comprising coating

摘要

The present invention is related to carbon-doped metal oxide films. The carbon-doped metal oxide films provide a low coefficient of friction, for example ranging from about 0.05 to about 0.4. In addition, the carbon-doped metal oxide films applied over a silicon substrate, for example, provide anti-stiction properties, where the measured work of adhesion for a MEMS device cantilever beam coated with the carbon-doped metal oxide film is less than 10 μJ/m2. In addition, the carbon-doped metal oxide films provide unexpectedly good water vapor transmission properties. The carbon content in the carbon-doped metal oxide films ranges from about 5 atomic % to about 20 atomic %.

主权项

1. A device having a wear-resistant protective film which provides a coefficient of friction which is less than about 0.4, wherein said device comprises:
a MEMS device; and a carbon-doped metal oxide film applied over a surface of said MEMS device, wherein said metal is selected from the group consisting of aluminum, indium, titanium, zirconium, hafnium, tantalum, and combinations thereof, wherein a carbon content of said carbon-doped film ranges from about 5 atomic % to about 20 atomic %, wherein the carbon-doping provides for a measured work of adhesion less than or equal to 10 μJ/m2.