| 摘要 |
The present invention provides a substrate transfer robot. According to the present invention, a substrate arrangement state in a substrate loading portion can be detected even in a case where an arm of the substrate transfer robot is relatively short. In the substrate transfer robot (13), a control unit (133) detects the arrangement state of the substrate (110) in a cassette (30) by using a detection unit (150) in a state where a hand portion (131) is inclined, in a plan view, toward a pivot center (C1) of the substrate transfer robot with respect to a substrate storage center line (141) which is directed to be perpendicular to a front surface of the cassette (30). |
