发明名称 Ultrasonic cleaning apparatus
摘要 The invention provides an ultrasonic cleaning apparatus in which unevenness of sound pressure among a plurality of oscillating elements is solved by emitting uniform ultrasonic waves, the rate of removal of fine particles is improved, and the uneven cleaning is avoided. The ultrasonic cleaning apparatus includes a cleaning bath that stores an object to be cleaned and cleaning solvent; a plurality of oscillating elements attached to the cleaning bath; a plurality of oscillators connected respectively to the plurality of oscillating elements for exciting the plurality of oscillating elements; and a controller connected to the plurality of oscillators for controlling the plurality of oscillators to output signals having the same phase or substantially the same phase to the plurality of oscillating elements.
申请公布号 US8899247(B2) 申请公布日期 2014.12.02
申请号 US200712225760 申请日期 2007.09.10
申请人 Kaijo Corporation 发明人 Hasegawa Hiroshi;Kamamura Tomoharu
分类号 B06B1/02;B08B3/04;B08B3/10;B08B3/12;H01L21/67;H01L41/09 主分类号 B06B1/02
代理机构 Holtz, Holtz, Goodman & Chick PC 代理人 Holtz, Holtz, Goodman & Chick PC
主权项 1. An ultrasonic cleaning apparatus comprising: a cleaning bath that stores an object to be cleaned and cleaning solvent; a plurality of oscillating elements attached to the cleaning bath; a plurality of oscillators connected respectively to the plurality of oscillating elements for exciting the plurality of oscillating elements, wherein each of the plurality of oscillators is respectively provided with a signal generation circuit which generates a signal and an electric power amplifying circuit which amplifies and outputs the signal generated by the signal generation circuit to a corresponding one of the plurality of oscillating elements to excite said corresponding one of the plurality of oscillating elements; a plurality of power sources which are respectively connected to the plurality of oscillators for supplying electric power to the plurality of oscillators; and a single controller which is connected to the plurality of signal generation circuits of the plurality of oscillators and which controls the plurality of signal generation circuits to output signals of substantially a same phase to the plurality of oscillating elements by outputting a synchronization pulse to the plurality of signal generation circuits so as to synchronize the signals outputted from the plurality of signal generation circuits; wherein the single controller which is connected to the plurality of signal generation circuits of the plurality of oscillators outputs an oscillation start timing pulse, and outputs the synchronization pulse at certain time intervals irrespective of an operating state of the oscillators after having started the oscillation.
地址 Tokyo JP