Semiconductor gas sensor and method for measuring a residual gas proportion with a semiconductor gas sensor

摘要

A semiconductor gas sensor is provided that has a gas-sensitive gate electrode separated by a gap from a channel region and is embodied as a suspended gate field effect transistor or the gate electrode is arranged as a first plate of a capacitor with gap and a second plate of the capacitor is connected to a gate of the field effect transistor embodied as capacitively controlled and the gate electrode has a conductive carrier layer with a bearing adhesion promoter layer and a gas-sensitive layer bearing on the adhesion promoter layer, wherein the gate electrode as a gas-sensitive layer has a platinum/gold alloy with a gold proportion in a range of 1% to 20% and a polymer layer with a thickness of less than 100 nm is embodied on the surface of the platinum/gold alloy and the gap is filled with an oxygen-free gas mixture.

主权项

1. A semiconductor gas sensor comprising:
a gas-sensitive gate electrode separated by a gap from a channel region and is configured as a suspended gate field effect transistor or the gas-sensitive gate electrode is arranged as a first plate of a capacitor with a gap and a second plate of the capacitor is connected to a gate of the field effect transistor embodied as capacitively controlled; and a semiconductor carrier layer or metallically conductive carrier layer with a bearing adhesion promoter layer and a gas-sensitive layer bearing on the adhesion promoter layer; wherein a surface of the gas-sensitive layer faces towards the channel region or the second plate, wherein the gate electrode configured as a gas-sensitive layer has a platinum/gold alloy with a gold proportion in a range of 1% to 20% and a polymer layer with a thickness of less than 100 nm and is embodied on the surface of the platinum/gold alloy, and wherein the gap is filled with an oxygen-free gas mixture or a gas mixture with an oxygen proportion of less than 0.1%.