Defect inspection apparatus and defect inspection method using the same

摘要

A defect inspection apparatus comprises a table on which a substrate is placed, a first detection unit which is disposed above the table to detect an optical signal from the substrate, a second detection unit which is disposed above the table to detect an electrical signal from the substrate, and a signal processing unit which is connected to the first detection unit and the second detection unit to detect a chemical defect using the optical signal and the electrical signal.

主权项

1. A defect inspection apparatus comprising:
a table on which a substrate is placed; a first detection unit which is disposed above the table and which detects an optical signal from the substrate; a second detection unit which is disposed above the table and which detects an electrical signal from the substrate; and a signal processing unit which is connected to the first detection unit and the second detection unit and which detects a chemical defect using the optical signal and the electrical signal, wherein the signal processing unit detects a physical defect based on the optical signal, and detects an electrical defect based on the electrical signal, and detects a chemical defect based on an electrical defect which does not correspond to a physical defect.