Nanopore sensor device

摘要

A pair of electrode plates can be provided by directional deposition and patterning of a conductive material on sidewalls of a template structure on a first dielectric layer. An electrode line straddling the center portion is formed. A dielectric spacer and a conformal conductive layer are subsequently formed. Peripheral electrodes laterally spaced from the electrode line are formed by pattering the conformal conductive layer. After deposition of a second dielectric material layer that encapsulates the template structure, the template structure is removed to provide a cavity that passes through the pair of electrode plates, the electrode line, and the peripheral electrodes. A nanoscale sensor thus formed can electrically characterize a nanoscale string by passing the nanoscale string through the cavity while electrical measurements are performed employing the various electrodes.

主权项

1. A method of forming a sensor structure, said method comprising:
forming a template structure on a first dielectric material layer, forming an electrode line straddling said template structure; forming a dielectric spacer around said electrode line; forming peripheral electrodes laterally spaced from said electrode line by said dielectric spacer; forming a second dielectric material layer over said template structure; and removing said template structure selective to said first and second dielectric material layers to form a cavity, wherein a sensor structure comprising said cavity and at least said electrode line is formed.