EVAPORATION DEPOSITION APPARATUS

摘要

Provided is an evaporation deposition apparatus. The evaporation deposition apparatus includes an evaporation part which provides a deposition material through a connection path, a distribution part which includes holes and injects the deposition material into a vacuum chamber through the hole, a dielectric part which is installed at the peripheral part of the vacuum chamber and protrudes from the chamber and surrounds the evaporation part and the distribution part, an induction coil which surrounds the evaporation part and the distribution part and inductively heats the evaporation part and the distribution part, and an AC power source which provides an AC to the induction coil.