发明名称 METHOD FOR REMOVING RESIST
摘要 <p>Provided is a method of removing a resist capable of sufficiently peeling a resist off without generating cracks, popping, etc. The method removes the resist by ashing the resist in the atmosphere, and includes a first process of applying the resist to a soluble liquid, and a second process of ashing the resist, to which the liquid is applied.</p>
申请公布号 KR20140136899(A) 申请公布日期 2014.12.01
申请号 KR20140060949 申请日期 2014.05.21
申请人 AP SYSTEMS INC. 发明人 HAN, JAE HYUN;KWAK, SUNG HO
分类号 H01L21/302 主分类号 H01L21/302
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