| 摘要 |
<p>APPARATUS AND A METHOD FOR OPERATING THE APPARATUS TO REMOVE AT LEAST ONE CHIP-TYPE SEMICONDUCTOR COMPONENT (10) FROM AN ADHESIVE FILM (12). THE METHOD COMPRISES: ARRANGING A LIFTING DEVICE (22) WITH RESPECT TO THE FILM, WHEREIN A CONTACT REGION (30) OF THE LIFTING DEVICE BEARS AGAINST A SECOND MAIN SURFACE (122) OF THE FILM, OPPOSITE A CHIP-TYPE SEMICONDUCTOR COMPONENT THAT IS ARRANGED ON A FIRST MAIN SURFACE (120) AND IS TO BE LIFTED OFF. THEN, APPLYING EITHER A CONSTANT VACUUM TO A PLURALITY OF SUCTION CUTOUTS (50, 52) OF THE LIFTING DEVICE, BY MEANS OF AN ASSIGNED VACUUM REGULATING DEVICE (60, 62), OR APPLYING DIFFERENT VALUES OF THE VACUUM FOR DIFFERENT SUCTION CUTOUTS OR GROUPS OF SUCTION CUTOUTS. NEXT, PARTIALLY DEFORMING THE FILM IN THE CONTACT REGION BY USING LIFTING MEANS (40) ARRANGED IN ASSIGNED CUTOUTS (42) OF THE LIFTING DEVICE TO LIFT THE FILM. FINALLY, USING A REMOVAL DEVICE (20) TO REMOVE THE AT LEAST ONE SEMICONDUCTOR COMPONENT FROM THE FILM.</p> |
