发明名称 SHOWER HEAD ASSEMBLY
摘要 <p>According to an embodiment of the present invention, a shower head assembly is for freely forming a gas hole according to a design condition without a limit of a combining part combining multiple plates and preventing a problem interrupting the flow of gas due to the combining part. The assembly includes a first plate, a second plate installed separately from the first plate to form a flow space for gas in a gap from the first plate and having multiple gas holes formed to be connected to the flow space, and at least one combining part installed between the first and second plates to combine the first and second plates. The combining part is formed between the first and second plates, fixed to the first and second plates, and includes a connecting member having a connection hole formed inside to connect the flow space with at least one gas hole.</p>
申请公布号 KR101466835(B1) 申请公布日期 2014.11.28
申请号 KR20130109617 申请日期 2013.09.12
申请人 SONG, WOONG SUB;YEO, IN TAE;LEE, YOUNG MOOK;MYUNG, KYUNG EUN 发明人 SONG, WOONG SUB;YEO, IN TAE;LEE, YOUNG MOOK;MYUNG, KYUNG EUN
分类号 H01L21/205;H01L21/3065 主分类号 H01L21/205
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