| 摘要 |
<p>Disclosed are a high speed substrate inspection device using persistent light and improves an optical processing speed and a high speed substrate inspection method using the same. The high speed inspection device includes a substrate transfer unit which transfers a substrate; a light source which emits light; an incident optical system which guides the light to the substrate being transferred and separates the light reflected from the substrate into first reflected light and second reflected light; a first optical sensor which detects the first reflected light; a first reflective optical system which guides the first reflected light to the first optical sensor; a focus matching unit which adjusts the focus of incident light passing through the substrate by using the first reflected light detected in the first optical sensor; a second reflective optical system which guides the second reflected light to a path different from that of the first reflected light; and a second optical sensor which detects the second reflected light.</p> |
