COATING MATERIAL FOR METAL OXIDE THIN FILM PATTERNING AND METAL OXIDE THIN FILM PATTERNING METHOD USING NANOIMPRINT

摘要

The present invention relates to a coating agent for a metal oxide thin film patterning, and a metal oxide thin film patterning method using nanoimprint which uses an optimal coating agent to reduce curing time and enable imprint. The present invention provides the coating agent for metal oxide thin film, characterized by comprising: a zirconium oxide precursor consisting of zirconyl 2-ethylhexanoate and zirconium carboxyethyl acrylate in accordance to an embodiment of the present invention; an initiator and a solvent; and to the metal oxide thin film patterning method using nanoimprint.