| 摘要 |
A capacitive physical quantity sensor is provided with a first substrate (14, 15), a movable electrode (24), a fixed electrode (31, 41), a second substrate (11, 201), a signal application unit (120, 130), a C-V conversion circuit (110), and an auxiliary electrode (71, 72). The auxiliary electrode is disposed on a portion of the second substrate that opposes the moveable electrode and opposes the displaceable area of the moveable electrode. By applying a prescribed electric potential to the auxiliary electrode during self-diagnosis, the signal application unit increases the density of the lines of electric force generated between the fixed electrode, which is directionally positioned so as to displace the moveable electrode, and the moveable electrode. |
