| 发明名称 |
METHOD FOR CHARACTERIZATION OF A SURFACE TOPOGRAPHY |
| 摘要 |
A method for characterization of a surface topography, comprising application of the following steps:
measurement of the surface topography;first fitting of data output from the measurement of the surface topography, made from an order m first equation;filter height of data output from application of the first fitting;determine the data fitting coefficients for data output from the application of filtering, from an order n second equation;second fitting of data output from application of the first fitting, made from the order n second equation and previously determined coefficients;n and m being positive integers greater than or equal to 1 and such that n≧m. |
| 申请公布号 |
US2014350887(A1) |
申请公布日期 |
2014.11.27 |
| 申请号 |
US201414276302 |
申请日期 |
2014.05.13 |
| 申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE ALT |
发明人 |
BEITIA CACERES Carlos;DETTONI Florent |
| 分类号 |
G01B21/20 |
主分类号 |
G01B21/20 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method for characterization of a surface topography, comprising at least application of the following steps:
measurement of the surface topography; first fitting of data output from the measurement of the surface topography, made from an order m first equation; filter data output from application of the first fitting, eliminating some of the data output from application of the first fitting the values of which are greater than a maximum value or less than a minimum value; determine the data fitting coefficients for data output from the application of filtering, from an order n second equation; second fitting of data output from application of the first fitting, made from the order n second equation and coefficients determined by application of the previous determination step; n and m being positive integers greater than or equal to 1 and such that n≧m. |
| 地址 |
Paris FR |
