发明名称 |
ENERGY BEAM IRRADIATION SYSTEM AND WORK TRANSFER MECHANISM |
摘要 |
<p>The invention provides an energy beam irradiation system and a workpiece conveying mechanism, which can greatly improve the production rate and is helpful for effective use of an energy beam. The energy beam irradiation system comprises an energy beam transmitting mechanism and a workpiece holder for conveying workpieces (W) irradiating the energy beam between a workpiece delivery area and an irradiation area (AR) of the energy beam, the workpiece delivery area comprises two areas away from each other with respect to a virtual straight line through the irradiation area (AR) and the workpiece holder (21) comprises a first workpiece holder (21 (1)) moving between one delivery area and the irradiation area (AR) and a second workpiece holder (21 (2)) moving between the other delivery area and the irradiation area (AR).</p> |
申请公布号 |
SG2014006076(A) |
申请公布日期 |
2014.11.27 |
申请号 |
SG20140006076 |
申请日期 |
2014.01.24 |
申请人 |
NISSIN ION EQUIPMENT CO., LTD. |
发明人 |
MASATOSHI ONODA;JUNICHI TATEMICHI;TAKESHI MATSUMOTO |
分类号 |
H01L21/67;B65G49/07;H01J37/20 |
主分类号 |
H01L21/67 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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