LASER TRACKING INTERFEROMETER

摘要

A laser tracking interferometer has a carriage provided with a first displacement gauge outputting a displacement signal associated with a relative displacement from a reference sphere; a second retroreflector provided to the carriage; a laser interferometer provided to the carriage and outputting a displacement signal associated with a relative displacement between the first retroreflector and the second retroreflector; and a data processor calculating a displacement of the first retroreflector with reference to the reference sphere based on the displacement signal output from the first displacement gauge and the displacement signal output from the laser interferometer.

主权项

1. A laser tracking interferometer for detecting a displacement of a first retroreflector by utilizing interference of a laser beam emitted toward the first retroreflector as a measured body and reflected by the first retroreflector in a return direction, the laser tracking interferometer performing tracking by using a positional change of an optical axis of the laser beam, the laser tracking interferometer comprising:
a reference sphere fixed in place; a carriage having a first displacement gauge configured to output a displacement signal associated with a relative displacement between the first displacement gauge and the reference sphere; a second retroreflector provided on the carriage; a laser interferometer configured to output a displacement signal associated with a relative displacement between the first retroreflector and the second retroreflector; and a data processor configured to calculate a displacement of the first retroreflector with reference to the reference sphere based on the displacement signal output from the first displacement gauge and the displacement signal output from the laser interferometer.