发明名称 |
LITHOGRAPHY DEVICE WITH EDDY-CURRENT BRAKE |
摘要 |
A lithography device includes an eddy-current brake for damping the movement of a structural element of the lithography device. The eddy-current brake includes a plurality of magnets disposed in an arc-shaped arrangement, and a plurality of electrically conductive sheets arranged respectively between adjacent ones of the magnets. A relative movement between the magnets and the electrically conductive sheets in a direction to be damped inducing eddy currents in the electrically conductive sheets. |
申请公布号 |
US2014346909(A1) |
申请公布日期 |
2014.11.27 |
申请号 |
US201414456541 |
申请日期 |
2014.08.11 |
申请人 |
Carl Zeiss SMT GmbH |
发明人 |
Vogler Alexander;Hauf Markus |
分类号 |
H02K49/04;G03F7/20;H02K49/10 |
主分类号 |
H02K49/04 |
代理机构 |
|
代理人 |
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主权项 |
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地址 |
Oberkochen DE |