| 发明名称 |
LASER APPARATUS, LASER SYSTEM, AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS |
| 摘要 |
A laser apparatus includes a master oscillator configured to output a pulse laser beam, at least one amplifier disposed in an optical path of the pulse laser beam, an energy detector that is disposed in the optical path on one of an input side and an output side of the amplifier and that is configured to detect energy of self-oscillating light from the amplifier, a gain adjustment section configured to adjust the gain of the amplifier, and a control unit configured to control the gain adjustment section based on a detection result from the energy detector when a pulse laser beam is not being inputted into the amplifier from the master oscillator. |
| 申请公布号 |
US2014346375(A1) |
申请公布日期 |
2014.11.27 |
| 申请号 |
US201414455669 |
申请日期 |
2014.08.08 |
| 申请人 |
GIGAPHOTON INC. |
发明人 |
NOWAK Krzysztof;SUGANUMA Takashi;WAKABAYASHI Osamu |
| 分类号 |
H01S3/10;H01S3/104;H01S3/097;H05G2/00 |
主分类号 |
H01S3/10 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A laser apparatus comprising:
a master oscillator configured to output a pulse laser beam; at least one amplifier disposed in an optical path of the pulse laser beam; an energy detector that is disposed in the optical path on one of an input side and an output side of the amplifier and that is configured to detect energy of self-oscillating light from the amplifier; a gain adjustment section configured to adjust a gain of the amplifier; and a control unit configured to control the gain adjustment section based on a detection result from the energy detector when a pulse laser beam is not being inputted into the amplifier from the master oscillator. |
| 地址 |
Tochigi-ken JP |
