发明名称 SELECTIVE DEPOSITION OF SILVER FOR NON-VOLATILE MEMORY DEVICE FABRICATION
摘要 A method of forming a non-volatile memory device includes providing a semiconductor substrate having a surface region, thereafter forming a first dielectric layer overlying, thereafter forming a first wiring material, thereafter forming amorphous silicon layer, and patterning and etching these layers to form first structures extending in a first direction and having a switching element. Thereafter, a method may include depositing a second dielectric layer overlying the first structures and having a dielectric surface region, forming an opening region in the second dielectric material to exposing part of the switching element, and depositing a silver material in the opening region, but not on the dielectric surface region.
申请公布号 US2014346427(A1) 申请公布日期 2014.11.27
申请号 US201414455822 申请日期 2014.08.08
申请人 Crossbar, Inc. 发明人 HERNER Scott Brad
分类号 H01L45/00;H01L27/24 主分类号 H01L45/00
代理机构 代理人
主权项
地址 Santa Clara CA US