| 摘要 |
A fluid control apparatus (100) is provided with a piezoelectric pump (10) and a valve (101). The valve (101) is provided with a second valve housing (192), a second seal material (152), a diaphragm (120), a first seal material (151), and a first valve housing (191), and the valve has a structure wherein the second valve housing, the second seal material, the diaphragm, the first seal material, and the first valve housing are sequentially laminated. The first valve housing (191) has a second vent hole (112), a third vent hole (113), a valve seat (139), and six openings (182). The second valve housing (192) has a first vent hole (110), a first vent hole (111), a valve seat (138), and six first protruding sections (180). Furthermore, the second valve housing (192) has six second protruding sections (181), which are positioned further toward the circumferential edge side than the six first protruding sections (180) in planar view from the X axis direction. |
