| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a coating applicator which protects a peripheral edge part including an end surface of a substrate, unfailingly prevents dust from being occurred from a substrate end part, and improves the strength of the substrate.SOLUTION: A coating applicator 1 applies a liquid to a peripheral edge part including an end surface of a substrate 2 and includes: a support table 10 which supports the substrate 2; an application unit 20 to which an application roller 22 is attached; a moving unit 40 which moves the application unit 20; a liquid supply unit 50 which supplies a film formation liquid 57 to an annular groove 22a of the application roller 22; and a control section 70 which controls the moving unit 40 so that the application roller 22 is moved along the peripheral edge part of the substrate 2 in a state where the annular groove 22a of the application roller 22 is positioned in the peripheral edge part of the substrate 2 supported by the support table 10.</p> |
