| 发明名称 |
ADAPTER FOR VACUUM PUMPS AND ASSOCIATED PUMPING DEVICE |
| 摘要 |
The invention relates to an adapter for vacuum pumps, characterized in that it comprises an annular inlet flange (15) intended to be coupled to an outlet orifice of a chamber and an outlet coupling (16) comprising at least two cylindrical outlet through-housings (21) and forming an at least partial pump casing for the case (4) of a respective turbomolecular vacuum pump (3), said turbomolecular vacuum pumps (3) being intended to be received in a respective cylindrical outlet housing (21). The invention also relates to a pumping device, characterized in that it comprises an adapter for vacuum pumps (2) as described hereinabove and at least two turbomolecular vacuum pumps (3) housed at least partially in a respective cylindrical outlet housing (21). |
| 申请公布号 |
US2014348634(A1) |
申请公布日期 |
2014.11.27 |
| 申请号 |
US201214367131 |
申请日期 |
2012.12.20 |
| 申请人 |
PFEIFFER VACUUM GMBH |
发明人 |
Bourrilhon Thibaut;Mathes Rainer;Varennes Nicolas |
| 分类号 |
F04D19/04;F04D29/60;F04D25/16 |
主分类号 |
F04D19/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An adapter for vacuum pumps, characterized in that it comprises an annular inlet flange (15) intended to be coupled to an outlet orifice of a chamber and an outlet coupling (16) comprising at least two cylindrical outlet through-housings (21) and forming an at least partial pump casing for the case (4) of a respective turbomolecular vacuum pump (3), said turbomolecular vacuum pumps (3) being intended to be accommodated in a respective cylindrical outlet housing (21). |
| 地址 |
Asslar DE |
