发明名称 MAGNETIC FIELD SENSOR DEVICE
摘要 A magnetic field sensor device having a semiconductor body, whereby the semiconductor body has a top side and a bottom side, and whereby the semiconductor body has a substrate layer and a passivation layer formed above the substrate on the top side of the semiconductor body, and one or more integrated electronic components are formed in the substrate layer of the semiconductor body, and a Hall plate is provided on the top side of the semiconductor body above the passivation layer, and the Hall plate is formed of a graphene compound.
申请公布号 US2014346579(A1) 申请公布日期 2014.11.27
申请号 US201414287559 申请日期 2014.05.27
申请人 Micronas GmbH 发明人 FRANKE Joerg
分类号 H01L43/06;H01L23/552;H01L27/22 主分类号 H01L43/06
代理机构 代理人
主权项 1. A magnetic field sensor device comprising: a semiconductor body with a top side and a bottom side, the semiconductor body having a substrate layer and a passivation layer formed above the substrate layer on the top side of the semiconductor body; at least one electronic component formed in the substrate layer; and a Hall plate arranged on the top side of the semiconductor body above the passivation layer, wherein the Hall plate is formed of a graphene compound.
地址 Freiburg DE