发明名称 FILM FOR SEMICONDUCTOR DEVICE MANUFACTURING, MANUFACTURING METHOD OF FILM FOR SEMICONDUCTOR DEVICE MANUFACTURING, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
摘要 <p>PROBLEM TO BE SOLVED: To favorably detach a dicing tape with an adhesive layer from a separator.SOLUTION: In a semiconductor device manufacturing method using a film for semiconductor device manufacturing, the film for semiconductor device manufacturing is characterized that: (a) a dicing tape with an adhesive layer in which an adhesive layer is laminated on a dicing tape is laminated on a separator at a predetermined distance from the separator by application of the adhesive layer as a bonding surface; (b) the separator has a slit along an outer periphery of the dicing tape; (c) a depth of the slit is not more than 2/3 of a thickness of the separator; and (d) the adhesive layer is added with a coloring agent and attached to a rear face of a semiconductor chip included in a flip-chip mounted semiconductor device. The semiconductor device manufacturing method comprises a process of detaching a separator from a film for semiconductor device manufacturing and a process of attaching a semiconductor wafer to an adhesive layer.</p>
申请公布号 JP2014222779(A) 申请公布日期 2014.11.27
申请号 JP20140161247 申请日期 2014.08.07
申请人 NITTO DENKO CORP 发明人 TAKAMOTO HISAHIDE;SHIGA GOSHI;ASAI FUMITERU
分类号 H01L21/301;C09J7/02;C09J201/00;H01L21/60 主分类号 H01L21/301
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