| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an improved method for optically capturing an illuminated sample.SOLUTION: In a method in which illumination light is spatially structured to illuminate a sample 1, a plurality of images of the sample are recorded by a detector 11 at various positions in the structure on the sample, and an image in which at least one of an optical cross-sectional image and resolution is improved is calculated from the plurality of images. A diffraction pattern is formed in the pupil of an objective lens 5, in a plane 9 conjugate to the pupil of the objective lens, or in the vicinity thereof; a structured phase plate 19 including areas with various phase delays is allocated to the diffraction pattern in the pupil of the objective lens, in the plane conjugate to the pupil of the objective lens, or in the vicinity thereof; the phase plate is moved to adjust various phase positions of the illumination light on the sample for at least one diffraction order; the diffraction order is selected preferably through a displaceable diaphragm; and the displaceable diaphragm is arranged in the pupil of the objective lens, in the plane conjugate to the pupil of the objective lens, or in the vicinity thereof.</p> |
