REFLECTIVE ANODE ELECTRODE FOR USE IN AN ORGANIC ELECTROLUMINESCENT DISPLAY AND METHOD FOR MAKING THE SAME

摘要

Provided is a method for making a reflective anode electrode for use in an organic electroluminescent display, comprising the steps of: sputtering a reflective Ag layer on a substrate in the presence of the inert gas in a first chamber; sputtering a transparent oxide conductive buffer layer on said Ag layer in the presence of the inert gas in a second chamber; and sputtering a transparent oxide conductive contact layer on said buffer layer in the presence of both inert gas and oxygen in the second chamber, to obtain the resulted reflective anode electrode. Also provided is a reflective anode electrode made by above method. The reflective anode electrode according to the present invention has higher reflectance and transmittance, due to the presence of the transparent conductive oxide buffer layer therein, which leads to the oxidation of the reflective layer minimized and the total transmittance substantially not affected.

主权项

1. A method for making a reflective anode electrode for use in an organic electroluminescent display, comprising the steps of:
(1) sputtering a reflective Ag layer on a substrate in the presence of the inert gas in a first chamber; (2) sputtering a transparent oxide conductive buffer layer on said Ag layer in the presence of the inert gas in a second chamber; and (3) sputtering a transparent oxide conductive contact layer on said buffer layer in the presence of both inert gas and oxygen in the second chamber, to obtain the resulted reflective anode electrode.