NOVEL RUTHENIUM COMPOUND, METHOD FOR MANUFACTURING SAME, PRECURSOR COMPOSITION FOR DEPOSITING FILM, COMPRISING SAME, AND METHOD FOR DEPOSITING FILM USING SAME

摘要

The present invention relates to a novel ruthenium compound, a method for manufacturing the ruthenium compound, a precursor composition for depositing a film, the precursor composition comprising the ruthenium compound, and a method for depositing a film by using the precursor composition.