| 摘要 |
FIELD: measurement equipment.SUBSTANCE: linear displacement transducer is a device containing two grating arrays, one of which is a measurement array rigidly attached to a guide, and the other one is a display array, a carriage with a radiation source and a photodetector array for information readout at movement of one of the arrays along guides. Deviation from linearity of the guide surface adds an error to a displacement value, therefore, the guide shall be of such a processing accuracy, which is compatible with accuracy of a linear displacement transducer.EFFECT: improving accuracy of a linear displacement transducer in the whole measurement range of a linear size of an object irrespective of quality of guides.2 dwg |
