发明名称 METHOD OF OBTAINING MATERIAL FOR HIGH TEMPERATURE MASS-SENSITIVE PIEZORESONANCE SENSOR BASED ON MONOCRYSTAL OF LANTHANUM-GALLIUM ALLUMINIUM TANTALATE
摘要 FIELD: chemistry.SUBSTANCE: method of obtaining a material for a high temperature mass-sensitive piezoresonance sensor based on a monocrystal of lanthanum-gallium aluminium tantalate, the composition of which corresponds to formula LaTaGaAlO, where x=0.1-0.3, characterised by the electric resistance not less than 10Ohm at a temperature of 20-600°C, includes growing of monocrystals from a melt of oxides its component constituents in an atmosphere of an oxidiser-containing inert gas, and additional annealing in air at a temperature of 1050-1150°C for 41-43 hours.EFFECT: increase of exploitation properties, such as the electric resistance of the material itself, increased by more than an order, and extension of the work temperature range to room temperature.4 cl, 2 dwg, 5 tbl
申请公布号 RU2534104(C1) 申请公布日期 2014.11.27
申请号 RU20130127790 申请日期 2013.06.19
申请人 FEDERAL'NOE GOSUDARSTVENNOE BJUDZHETNOE UCHREZHDENIE NAUKI INSTITUT PROBLEM TEKHNOLOGII MIROEHLEKTRONIKI I OSOBOCHISTYKH MATERIALOV ROSSIJSKOJ AKADEMII NAUK (IPTM RAN) 发明人 EMELIN EVGENIJ VALER'EVICH;IRZHAK DMITRIJ VADIMOVICH;ROSHCHUPKIN DMITRIJ VALENTINOVICH
分类号 C30B15/02;C30B29/30;C30B33/02;H01L41/18;H01L41/22 主分类号 C30B15/02
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