| 摘要 |
<p>PURPOSE: A multi-workpiece processing chamber and a workpiece processing method thereof are provided to generate electric potential and plasma in process space uniformly by making dividing two symmetrical regions with a partition member. CONSTITUTION: A chamber housing(100) forms more than two internal process spaces. At least one partition member(200) is installed in the chamber housing and divides the chamber housing into two internal spaces(A,B). Each internal space is combined with the partition member and has symmetrical shape. The chamber housing has a first curved surface(110) having a fixed curvature. The partition member has a second curved surface(120) of the same curvature as the first curved surface. The first curved surface and the second curved surface are combined and a circle is formed. The chamber housing comprises a plurality of housings(130,140,150) which are combined reciprocally.</p> |
