发明名称 METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method and an apparatus for manufacturing a semiconductor device capable of improving the reliability of junction between the wire and the adherend.SOLUTION: A method for manufacturing a semiconductor device having an adherend 20 and a wire W electrically connected to the adherend 20, comprises: a preparation step for preparing the wire W having a projection P formed along an axis of the wire W; and a junction step for jointing the wire W and the adherend 20 by pressing the projection P of the wire W to the adherend 20 using a vibratile bonding tool 12.
申请公布号 JP2014222727(A) 申请公布日期 2014.11.27
申请号 JP20130102255 申请日期 2013.05.14
申请人 SUMITOMO ELECTRIC IND LTD 发明人 NOZU HIROSHI
分类号 H01L21/607 主分类号 H01L21/607
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