发明名称 METHOD OF GLASS APPLICATION
摘要 FIELD: chemistry.SUBSTANCE: invention relates to the technology of manufacturing semi-conductor devices and integrated circuits, in particular to methods of protecting the surface of crystals of p-n junctions against different external influences. In the method of applying glass to protect the surface of crystals of p-n junctions against different external influences, a layer of borate glass, including the following components: is applied on a clean surface of a semi-conductor substrate 25% silicon oxide, 40% zinc borate, 20% aluminium oxide and 15% zinc oxide ZnO. The 1.2 mcm thick film of borate glass is formed at a temperature of the process of 700°C.EFFECT: achievement of stability and reduction of the penetration of sodium ions.
申请公布号 RU2534563(C2) 申请公布日期 2014.11.27
申请号 RU20130100543 申请日期 2013.01.09
申请人 FEDERAL'NOE GOSUDARSTVENNOE BJUDZHETNOE OBRAZOVATEL'NOE UCHREZHDENIE VYSSHEGO PROFESSIONAL'NOGO OBRAZOVANIJA "DAGESTANSKIJ GOSUDARSTVENNYJ TEKHNICHESKIJ UNIVERSITET" (DGTU) 发明人 ISMAILOV TAGIR ABDURASHIDOVICH;SARKAROV TADZHIDIN EHKBEROVICH;SHANGEREEVA BIJKE ALIEVNA
分类号 H01L21/316 主分类号 H01L21/316
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