| 摘要 |
The present invention provides an acceleration measuring apparatus, a SQUID sensor module, and a manufacturing method thereof. The acceleration measuring apparatus includes: a test mass structure which includes a superconducting thin film on one side thereof and provides elasticity; a superconducting coil for measurement which is arranged on the substrate, faces one side of the test mass structure, and is magnetically combined with the test mass structure; a transformer which is arranged on the substrate and includes a first superconducting coil which is connected to the superconducting coil for measurement and a second superconducting coil which is magnetically combined with the first superconducting coil; an input coil which is arranged on the substrate and is connected to the second superconducting coil of the transformer; and a SQUID which is arranged on the substrate and is magnetically combined with the input coil. |
