发明名称 |
METHOD FOR MANUFACTURING SOLAR CELL |
摘要 |
Provided is a method of manufacturing a solar cell, wherein a solar cell is manufactured by combining a damage removal etching process, a texturing process and an edge isolation process. The method is advantageous in that RIE and DRE are conducted, and then DRE/PSG and/or an edge isolation removal process are simultaneously conducted, so that the movement of a substrate (that is, a wafer) is minimized, thereby reducing the damage rate of the substrate. |
申请公布号 |
EP2691989(A4) |
申请公布日期 |
2014.11.26 |
申请号 |
EP20120763636 |
申请日期 |
2012.02.24 |
申请人 |
HANWHA CHEMICAL CORPORATION |
发明人 |
HYUN, DEOC HWAN;CHO, JAE EOCK;LEE, DONG HO;AHN, GUI RYONG;RYU, HYUN CHEOL;LEE, YONG HWA;KIM, GANG II |
分类号 |
H01L31/0236;H01L31/18 |
主分类号 |
H01L31/0236 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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