发明名称 Resonator element, resonator, oscillator, and electronic device
摘要 A resonator element which has a small size, a low frequency, and a high Q value is provided. The resonator element includes a base portion (21) in which a pair of notches (31) is formed, a pair of vibrating arms (22) which is extended in parallel from one end side of a first portion (21a) of the base portion (21). Each vibrating arm includes a general portion (23) which is a major vibrating portion and a weight portion (29) which is formed at a tip end side of the vibrating arm on the opposite side of a root of the vibrating arm (22) attached to the base portion (21) and which has a larger width than the general portion. The vibrating arm (22) is provided with a bottomed elongated groove (26a,26b) which has an opening along at least one principal surface of both principal surfaces of each vibrating arm (22) and a weight portion (25) which is formed at the tip end side of the vibrating arm (22) on the opposite side of the root of the vibrating arm (22) attached to the base portion (21) and which has a larger width than the width of the vibrating arm (22) on the root side attached to the base portion (21). The weight portion (29) is formed so that the proportion of the length of the weight portion (29) to the length from the root attached to the base portion (21) to the tip end side in a longitudinal direction of the vibrating arm (22) is within a range of 35% to 41%.
申请公布号 EP2372909(A3) 申请公布日期 2014.11.26
申请号 EP20110158240 申请日期 2011.03.15
申请人 SEIKO EPSON CORPORATION 发明人 YAMADA, AKINORI
分类号 H03H9/21;H01L41/09;H03B5/32;H03H3/04;H03H9/05;H03H9/10;H03H9/215;H03H9/24 主分类号 H03H9/21
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