| 摘要 |
<p>A dry vacuum pump apparatus includes a dry vacuum pump (10) having a final outlet port (18) and an intermediate release outlet port (19), an exhaust section check valve (51) connected to the final outlet port (18) and having an outlet port, an intermediate section check valve (52) connected to the intermediate release outlet port (19) and having an outlet port, and an exhaust passage (56) connected to the outlet port of the exhaust section check valve (51) and the outlet port of the intermediate section check valve (52), a silencer (53) connected to the exhaust passage (56) and having an outlet port connected to a final exhaust passage (56a) which is vented to the atmosphere.
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