| 摘要 |
The present invention relates to a dry vacuum pump apparatus to improve power efficiency and vacuum formation efficiency. More specifically, the present invention relates to a dry vacuum pump apparatus which reduces power consumption and improves vacuum formation efficiency by controlling discharge pressure by a pressure control unit to control inner pressure of a vacuum pump. The dry vacuum pump apparatus to improve power efficiency and vacuum formation efficiency includes a gas transfer duct connected to a vacuum chamber; a vacuum pump module connected to the gas transfer duct and having a rotor and a vacuum pump; a gas discharge duct connecting the vacuum pump module with a scrubber; and a pressure control unit to control inner pressure of the vacuum pump module, wherein the amount of gas discharged through the gas discharge duct or a discharge path, and the discharge pressure due to operation of the rotor installed in the vacuum pump module are controlled by operation of the pressure control unit. |
