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发明名称
半導体素子
摘要
申请公布号
JP5632062(B2)
申请公布日期
2014.11.26
申请号
JP20130223412
申请日期
2013.10.28
申请人
发明人
分类号
H01L21/82;H01L21/3205;H01L21/768;H01L21/822;H01L23/522;H01L27/04
主分类号
H01L21/82
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代理人
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