| 摘要 |
PROBLEM TO BE SOLVED: To adjust an optical axis with or without manual operation when correcting an inclination of an optical axis of a laser beam. SOLUTION: An exposure unit 1 is provided with an adjusting device 40 that adjusts an optical axis of a laser beam by displacing a second 2fθlens 37. The adjusting device 40 freely switches between manual optical axis adjustment for adjusting the optical axis with manual operation and automatic optical axis adjustment for adjusting the optical axis by the drive of the adjusting device 40 (driving unit 57). COPYRIGHT: (C)2013,JPO&INPIT |
