发明名称 半導体装置および電力変換装置
摘要 A semiconductor device which includes: a first semiconductor layer (4) of a first conductivity type; a second semiconductor layer (2) of a second conductivity type that is formed near a surface of the first semiconductor layer (4); a first main electrode (11) that is electrically connected to the second semiconductor layer (2); a third semiconductor layer (6) of the second conductivity type that neighbors the first semiconductor layer (4) and is formed near a surface of the first semiconductor layer (4) opposite to the second semiconductor layer (2); a fourth semiconductor layer (7) of the first conductivity type that is selectively disposed in an upper portion of the third semiconductor layer (6); a second main electrode (14) that is electrically connected to the third semiconductor layer (6) and the fourth semiconductor layer (7); a trench (17) whose side face is in contact with the third semiconductor layer (6) and the fourth semiconductor layer (7), while reaching the first semiconductor layer (4); a gate electrode (9) that is formed along the side face of the trench (17) by a sidewall of polysilicon; and a polysilicon electrode (18) that is disposed away from the gate electrode (9) within the trench (17) and electrically connected to the second main electrode (14).
申请公布号 JP5631752(B2) 申请公布日期 2014.11.26
申请号 JP20110003845 申请日期 2011.01.12
申请人 株式会社 日立パワーデバイス 发明人 白石 正樹;森 睦宏;鈴木 弘;渡邉 聡
分类号 H01L29/78;H01L21/28;H01L21/336;H01L27/04;H01L29/41;H01L29/739 主分类号 H01L29/78
代理机构 代理人
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